Filipek, Agnieszka Agata, and Patrycja Homa. “Yield Drift Prediction in Wafer Lithography Using a TabTransformer-CatBoost Hybrid Model”. Journal of Applied Automation Technologies, vol. 1, Dec. 2023, pp. 29e:389-403, doi:10.64972/jaat.2023v1.320p29e:389-403.