FILIPEK, Agnieszka Agata; HOMA, Patrycja. Yield Drift Prediction in Wafer Lithography Using a TabTransformer-CatBoost Hybrid Model. Journal of Applied Automation Technologies, [S. l.], v. 1, p. 29e:389–403, 2023. DOI: 10.64972/jaat.2023v1.320p29e:389-403. Disponível em: http://www.wpias.edu.pl/ojs/index.php/JAAT/article/view/320. Acesso em: 31 aug. 2026.